6/16/2010	9:18:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/16/2010	9:18:35 AM	Recipe started at 9:18 AM
6/16/2010	9:18:35 AM	H2 valve closed
6/16/2010	9:18:35 AM	BCl3 valve closed
6/16/2010	9:18:35 AM	PH3 valve closed
6/16/2010	9:18:35 AM	SiCl4 pre valve closed
6/16/2010	9:18:35 AM	SiCl4 post valve closed
6/16/2010	9:18:35 AM	Main Vac valve closed
6/16/2010	9:18:35 AM	Bypass valve closed
6/16/2010	9:18:35 AM	Bubbler valve closed
6/16/2010	9:18:35 AM	Helium valve opened
6/16/2010	9:18:35 AM	Helium MFC set to  500.000000
6/16/2010	9:18:35 AM	H2 MFC set to  0.000000
6/16/2010	9:18:35 AM	BCl3 MFC set to  0.000000
6/16/2010	9:18:35 AM	PHl3 MFC set to  0.000000
6/16/2010	9:18:35 AM	SiCl4 MFC set to  0.000000
6/16/2010	9:18:35 AM	Bypass solenoid MFC set to  0.000000
6/16/2010	9:18:35 AM	Tube furnace set to 0
6/16/2010	9:19:54 AM	Helium valve closed
6/16/2010	9:19:54 AM	H2 valve closed
6/16/2010	9:19:54 AM	BCl3 valve closed
6/16/2010	9:19:54 AM	PH3 valve closed
6/16/2010	9:19:54 AM	SiCl4 pre valve closed
6/16/2010	9:19:54 AM	SiCl4 post valve closed
6/16/2010	9:19:54 AM	Main Vac valve closed
6/16/2010	9:19:54 AM	Bypass valve closed
6/16/2010	9:19:54 AM	Bubbler valve closed
6/16/2010	9:19:54 AM	Helium MFC set to  0.000000
6/16/2010	9:19:54 AM	H2 MFC set to  0.000000
6/16/2010	9:19:54 AM	BCl3 MFC set to  0.000000
6/16/2010	9:19:54 AM	PHl3 MFC set to  0.000000
6/16/2010	9:19:54 AM	SiCl4 MFC set to  0.000000
6/16/2010	9:19:54 AM	Bypass solenoid MFC set to  0.000000
6/16/2010	9:19:55 AM	Tube furnace set to 0
6/16/2010	9:19:55 AM	Run finished at 9:19 AM
6/16/2010	9:19:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/16/2010	9:36:01 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2010	9:36:02 AM	Recipe started at 9:36 AM
6/16/2010	9:36:02 AM	Helium valve closed
6/16/2010	9:36:02 AM	H2 valve closed
6/16/2010	9:36:02 AM	BCl3 valve closed
6/16/2010	9:36:02 AM	PH3 valve closed
6/16/2010	9:36:02 AM	SiCl4 pre valve closed
6/16/2010	9:36:02 AM	SiCl4 post valve closed
6/16/2010	9:36:02 AM	Main Vac valve closed
6/16/2010	9:36:02 AM	Bubbler valve closed
6/16/2010	9:36:02 AM	Bypass valve opened
6/16/2010	9:36:02 AM	Helium MFC set to  0.000000
6/16/2010	9:36:02 AM	H2 MFC set to  0.000000
6/16/2010	9:36:02 AM	BCl3 MFC set to  0.000000
6/16/2010	9:36:02 AM	PHl3 MFC set to  0.000000
6/16/2010	9:36:02 AM	SiCl4 MFC set to  0.000000
6/16/2010	9:36:02 AM	Bypass solenoid MFC set to  0.000000
6/16/2010	9:36:02 AM	Tube furnace set to 0
6/16/2010	9:36:50 AM	Helium valve closed
6/16/2010	9:36:50 AM	H2 valve closed
6/16/2010	9:36:50 AM	BCl3 valve closed
6/16/2010	9:36:50 AM	PH3 valve closed
6/16/2010	9:36:50 AM	SiCl4 pre valve closed
6/16/2010	9:36:50 AM	SiCl4 post valve closed
6/16/2010	9:36:50 AM	Bubbler valve closed
6/16/2010	9:36:50 AM	Main Vac valve opened
6/16/2010	9:36:50 AM	Bypass valve opened
6/16/2010	9:36:50 AM	Helium MFC set to  0.000000
6/16/2010	9:36:50 AM	H2 MFC set to  0.000000
6/16/2010	9:36:50 AM	BCl3 MFC set to  0.000000
6/16/2010	9:36:50 AM	PHl3 MFC set to  0.000000
6/16/2010	9:36:50 AM	SiCl4 MFC set to  0.000000
6/16/2010	9:36:50 AM	Bypass solenoid MFC set to  0.000000
6/16/2010	9:36:50 AM	Tube furnace set to 0
6/16/2010	9:36:50 AM	Run finished at 9:36 AM
6/16/2010	9:36:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2010	9:37:14 AM	Program exited cleanly
6/16/2010	9:41:31 AM	Program started normally
6/16/2010	9:41:31 AM	Helium valve closed
6/16/2010	9:41:31 AM	H2 valve closed
6/16/2010	9:41:31 AM	BCl3 valve closed
6/16/2010	9:41:31 AM	PH3 valve closed
6/16/2010	9:41:31 AM	SiCl4 pre valve closed
6/16/2010	9:41:31 AM	SiCl4 post valve closed
6/16/2010	9:41:31 AM	Main Vac valve closed
6/16/2010	9:41:31 AM	Bypass valve closed
6/16/2010	9:41:31 AM	Bubbler valve closed
6/16/2010	9:41:31 AM	Helium MFC set to  0.000000
6/16/2010	9:41:31 AM	H2 MFC set to  0.000000
6/16/2010	9:41:31 AM	BCl3 MFC set to  0.000000
6/16/2010	9:41:31 AM	PHl3 MFC set to  0.000000
6/16/2010	9:41:31 AM	SiCl4 MFC set to  0.000000
6/16/2010	9:41:31 AM	Bypass solenoid MFC set to  760.000000
6/16/2010	9:41:32 AM	Tube furnace set to 0
6/16/2010	9:41:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2010	9:41:36 AM	Recipe started at 9:41 AM
6/16/2010	9:41:36 AM	Helium valve closed
6/16/2010	9:41:36 AM	H2 valve closed
6/16/2010	9:41:36 AM	BCl3 valve closed
6/16/2010	9:41:36 AM	PH3 valve closed
6/16/2010	9:41:36 AM	SiCl4 pre valve closed
6/16/2010	9:41:36 AM	SiCl4 post valve closed
6/16/2010	9:41:36 AM	Main Vac valve closed
6/16/2010	9:41:36 AM	Bubbler valve closed
6/16/2010	9:41:36 AM	Bypass valve opened
6/16/2010	9:41:36 AM	Helium MFC set to  0.000000
6/16/2010	9:41:36 AM	H2 MFC set to  0.000000
6/16/2010	9:41:36 AM	BCl3 MFC set to  0.000000
6/16/2010	9:41:36 AM	PHl3 MFC set to  0.000000
6/16/2010	9:41:36 AM	SiCl4 MFC set to  0.000000
6/16/2010	9:41:36 AM	Bypass solenoid MFC set to  0.000000
6/16/2010	9:41:36 AM	Tube furnace set to 0
6/16/2010	9:41:36 AM	Helium valve closed
6/16/2010	9:41:36 AM	H2 valve closed
6/16/2010	9:41:36 AM	BCl3 valve closed
6/16/2010	9:41:36 AM	PH3 valve closed
6/16/2010	9:41:36 AM	SiCl4 pre valve closed
6/16/2010	9:41:36 AM	SiCl4 post valve closed
6/16/2010	9:41:36 AM	Bubbler valve closed
6/16/2010	9:41:36 AM	Main Vac valve opened
6/16/2010	9:41:36 AM	Bypass valve opened
6/16/2010	9:41:36 AM	Helium MFC set to  0.000000
6/16/2010	9:41:36 AM	H2 MFC set to  0.000000
6/16/2010	9:41:36 AM	BCl3 MFC set to  0.000000
6/16/2010	9:41:36 AM	PHl3 MFC set to  0.000000
6/16/2010	9:41:36 AM	SiCl4 MFC set to  0.000000
6/16/2010	9:41:36 AM	Bypass solenoid MFC set to  0.000000
6/16/2010	9:41:36 AM	Tube furnace set to 0
6/16/2010	9:41:37 AM	Run finished at 9:41 AM
6/16/2010	9:41:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2010	9:41:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/16/2010	9:41:57 AM	Recipe started at 9:41 AM
6/16/2010	9:41:57 AM	H2 valve closed
6/16/2010	9:41:57 AM	BCl3 valve closed
6/16/2010	9:41:57 AM	PH3 valve closed
6/16/2010	9:41:57 AM	SiCl4 pre valve closed
6/16/2010	9:41:57 AM	SiCl4 post valve closed
6/16/2010	9:41:57 AM	Main Vac valve closed
6/16/2010	9:41:57 AM	Bypass valve closed
6/16/2010	9:41:57 AM	Bubbler valve closed
6/16/2010	9:41:57 AM	Helium valve opened
6/16/2010	9:41:57 AM	Helium MFC set to  500.000000
6/16/2010	9:41:57 AM	H2 MFC set to  0.000000
6/16/2010	9:41:57 AM	BCl3 MFC set to  0.000000
6/16/2010	9:41:57 AM	PHl3 MFC set to  0.000000
6/16/2010	9:41:57 AM	SiCl4 MFC set to  0.000000
6/16/2010	9:41:57 AM	Bypass solenoid MFC set to  0.000000
6/16/2010	9:41:57 AM	Tube furnace set to 0
6/16/2010	9:43:19 AM	Helium valve closed
6/16/2010	9:43:19 AM	H2 valve closed
6/16/2010	9:43:19 AM	BCl3 valve closed
6/16/2010	9:43:19 AM	PH3 valve closed
6/16/2010	9:43:19 AM	SiCl4 pre valve closed
6/16/2010	9:43:19 AM	SiCl4 post valve closed
6/16/2010	9:43:19 AM	Main Vac valve closed
6/16/2010	9:43:19 AM	Bypass valve closed
6/16/2010	9:43:19 AM	Bubbler valve closed
6/16/2010	9:43:19 AM	Helium MFC set to  0.000000
6/16/2010	9:43:19 AM	H2 MFC set to  0.000000
6/16/2010	9:43:19 AM	BCl3 MFC set to  0.000000
6/16/2010	9:43:19 AM	PHl3 MFC set to  0.000000
6/16/2010	9:43:19 AM	SiCl4 MFC set to  0.000000
6/16/2010	9:43:19 AM	Bypass solenoid MFC set to  0.000000
6/16/2010	9:43:19 AM	Tube furnace set to 0
6/16/2010	9:43:35 AM	Helium valve closed
6/16/2010	9:43:35 AM	H2 valve closed
6/16/2010	9:43:35 AM	BCl3 valve closed
6/16/2010	9:43:35 AM	PH3 valve closed
6/16/2010	9:43:35 AM	SiCl4 pre valve closed
6/16/2010	9:43:35 AM	SiCl4 post valve closed
6/16/2010	9:43:35 AM	Main Vac valve closed
6/16/2010	9:43:35 AM	Bubbler valve closed
6/16/2010	9:43:35 AM	Bypass valve opened
6/16/2010	9:43:35 AM	Helium MFC set to  0.000000
6/16/2010	9:43:35 AM	H2 MFC set to  0.000000
6/16/2010	9:43:35 AM	BCl3 MFC set to  0.000000
6/16/2010	9:43:35 AM	PHl3 MFC set to  0.000000
6/16/2010	9:43:35 AM	SiCl4 MFC set to  0.000000
6/16/2010	9:43:35 AM	Bypass solenoid MFC set to  0.000000
6/16/2010	9:43:35 AM	Tube furnace set to 0
6/16/2010	9:44:08 AM	Helium valve closed
6/16/2010	9:44:08 AM	H2 valve closed
6/16/2010	9:44:08 AM	BCl3 valve closed
6/16/2010	9:44:08 AM	PH3 valve closed
6/16/2010	9:44:08 AM	SiCl4 pre valve closed
6/16/2010	9:44:08 AM	SiCl4 post valve closed
6/16/2010	9:44:08 AM	Bubbler valve closed
6/16/2010	9:44:08 AM	Main Vac valve opened
6/16/2010	9:44:08 AM	Bypass valve opened
6/16/2010	9:44:08 AM	Helium MFC set to  0.000000
6/16/2010	9:44:08 AM	H2 MFC set to  0.000000
6/16/2010	9:44:08 AM	BCl3 MFC set to  0.000000
6/16/2010	9:44:08 AM	PHl3 MFC set to  0.000000
6/16/2010	9:44:08 AM	SiCl4 MFC set to  0.000000
6/16/2010	9:44:08 AM	Bypass solenoid MFC set to  0.000000
6/16/2010	9:44:09 AM	Tube furnace set to 0
6/16/2010	9:49:09 AM	H2 valve closed
6/16/2010	9:49:09 AM	BCl3 valve closed
6/16/2010	9:49:09 AM	PH3 valve closed
6/16/2010	9:49:09 AM	SiCl4 pre valve closed
6/16/2010	9:49:09 AM	SiCl4 post valve closed
6/16/2010	9:49:09 AM	Main Vac valve closed
6/16/2010	9:49:09 AM	Bypass valve closed
6/16/2010	9:49:09 AM	Bubbler valve closed
6/16/2010	9:49:09 AM	Helium valve opened
6/16/2010	9:49:09 AM	Helium MFC set to  500.000000
6/16/2010	9:49:09 AM	H2 MFC set to  0.000000
6/16/2010	9:49:09 AM	BCl3 MFC set to  0.000000
6/16/2010	9:49:09 AM	PHl3 MFC set to  0.000000
6/16/2010	9:49:09 AM	SiCl4 MFC set to  0.000000
6/16/2010	9:49:09 AM	Bypass solenoid MFC set to  0.000000
6/16/2010	9:49:09 AM	Tube furnace set to 0
6/16/2010	9:50:31 AM	Helium valve closed
6/16/2010	9:50:31 AM	H2 valve closed
6/16/2010	9:50:31 AM	BCl3 valve closed
6/16/2010	9:50:31 AM	PH3 valve closed
6/16/2010	9:50:31 AM	SiCl4 pre valve closed
6/16/2010	9:50:31 AM	SiCl4 post valve closed
6/16/2010	9:50:31 AM	Main Vac valve closed
6/16/2010	9:50:31 AM	Bypass valve closed
6/16/2010	9:50:31 AM	Bubbler valve closed
6/16/2010	9:50:31 AM	Helium MFC set to  0.000000
6/16/2010	9:50:31 AM	H2 MFC set to  0.000000
6/16/2010	9:50:31 AM	BCl3 MFC set to  0.000000
6/16/2010	9:50:31 AM	PHl3 MFC set to  0.000000
6/16/2010	9:50:31 AM	SiCl4 MFC set to  0.000000
6/16/2010	9:50:31 AM	Bypass solenoid MFC set to  0.000000
6/16/2010	9:50:31 AM	Tube furnace set to 0
6/16/2010	9:50:46 AM	Helium valve closed
6/16/2010	9:50:46 AM	H2 valve closed
6/16/2010	9:50:46 AM	BCl3 valve closed
6/16/2010	9:50:46 AM	PH3 valve closed
6/16/2010	9:50:46 AM	SiCl4 pre valve closed
6/16/2010	9:50:46 AM	SiCl4 post valve closed
6/16/2010	9:50:46 AM	Main Vac valve closed
6/16/2010	9:50:46 AM	Bubbler valve closed
6/16/2010	9:50:46 AM	Bypass valve opened
6/16/2010	9:50:46 AM	Helium MFC set to  0.000000
6/16/2010	9:50:46 AM	H2 MFC set to  0.000000
6/16/2010	9:50:46 AM	BCl3 MFC set to  0.000000
6/16/2010	9:50:46 AM	PHl3 MFC set to  0.000000
6/16/2010	9:50:46 AM	SiCl4 MFC set to  0.000000
6/16/2010	9:50:46 AM	Bypass solenoid MFC set to  0.000000
6/16/2010	9:50:46 AM	Tube furnace set to 0
6/16/2010	9:51:20 AM	Helium valve closed
6/16/2010	9:51:20 AM	H2 valve closed
6/16/2010	9:51:20 AM	BCl3 valve closed
6/16/2010	9:51:20 AM	PH3 valve closed
6/16/2010	9:51:20 AM	SiCl4 pre valve closed
6/16/2010	9:51:20 AM	SiCl4 post valve closed
6/16/2010	9:51:20 AM	Bubbler valve closed
6/16/2010	9:51:20 AM	Main Vac valve opened
6/16/2010	9:51:20 AM	Bypass valve opened
6/16/2010	9:51:20 AM	Helium MFC set to  0.000000
6/16/2010	9:51:20 AM	H2 MFC set to  0.000000
6/16/2010	9:51:20 AM	BCl3 MFC set to  0.000000
6/16/2010	9:51:20 AM	PHl3 MFC set to  0.000000
6/16/2010	9:51:20 AM	SiCl4 MFC set to  0.000000
6/16/2010	9:51:20 AM	Bypass solenoid MFC set to  0.000000
6/16/2010	9:51:20 AM	Tube furnace set to 0
6/16/2010	9:56:20 AM	H2 valve closed
6/16/2010	9:56:20 AM	BCl3 valve closed
6/16/2010	9:56:20 AM	PH3 valve closed
6/16/2010	9:56:20 AM	SiCl4 pre valve closed
6/16/2010	9:56:20 AM	SiCl4 post valve closed
6/16/2010	9:56:20 AM	Main Vac valve closed
6/16/2010	9:56:20 AM	Bypass valve closed
6/16/2010	9:56:20 AM	Bubbler valve closed
6/16/2010	9:56:20 AM	Helium valve opened
6/16/2010	9:56:20 AM	Helium MFC set to  500.000000
6/16/2010	9:56:20 AM	H2 MFC set to  0.000000
6/16/2010	9:56:20 AM	BCl3 MFC set to  0.000000
6/16/2010	9:56:20 AM	PHl3 MFC set to  0.000000
6/16/2010	9:56:20 AM	SiCl4 MFC set to  0.000000
6/16/2010	9:56:20 AM	Bypass solenoid MFC set to  0.000000
6/16/2010	9:56:20 AM	Tube furnace set to 0
6/16/2010	9:57:42 AM	Helium valve closed
6/16/2010	9:57:42 AM	H2 valve closed
6/16/2010	9:57:42 AM	BCl3 valve closed
6/16/2010	9:57:42 AM	PH3 valve closed
6/16/2010	9:57:42 AM	SiCl4 pre valve closed
6/16/2010	9:57:42 AM	SiCl4 post valve closed
6/16/2010	9:57:42 AM	Main Vac valve closed
6/16/2010	9:57:42 AM	Bypass valve closed
6/16/2010	9:57:42 AM	Bubbler valve closed
6/16/2010	9:57:42 AM	Helium MFC set to  0.000000
6/16/2010	9:57:42 AM	H2 MFC set to  0.000000
6/16/2010	9:57:42 AM	BCl3 MFC set to  0.000000
6/16/2010	9:57:42 AM	PHl3 MFC set to  0.000000
6/16/2010	9:57:42 AM	SiCl4 MFC set to  0.000000
6/16/2010	9:57:42 AM	Bypass solenoid MFC set to  0.000000
6/16/2010	9:57:43 AM	Tube furnace set to 0
6/16/2010	9:57:58 AM	Helium valve closed
6/16/2010	9:57:58 AM	H2 valve closed
6/16/2010	9:57:58 AM	BCl3 valve closed
6/16/2010	9:57:58 AM	PH3 valve closed
6/16/2010	9:57:58 AM	SiCl4 pre valve closed
6/16/2010	9:57:58 AM	SiCl4 post valve closed
6/16/2010	9:57:58 AM	Main Vac valve closed
6/16/2010	9:57:58 AM	Bubbler valve closed
6/16/2010	9:57:58 AM	Bypass valve opened
6/16/2010	9:57:58 AM	Helium MFC set to  0.000000
6/16/2010	9:57:58 AM	H2 MFC set to  0.000000
6/16/2010	9:57:58 AM	BCl3 MFC set to  0.000000
6/16/2010	9:57:58 AM	PHl3 MFC set to  0.000000
6/16/2010	9:57:58 AM	SiCl4 MFC set to  0.000000
6/16/2010	9:57:58 AM	Bypass solenoid MFC set to  0.000000
6/16/2010	9:57:58 AM	Tube furnace set to 0
6/16/2010	9:58:31 AM	Helium valve closed
6/16/2010	9:58:32 AM	H2 valve closed
6/16/2010	9:58:32 AM	BCl3 valve closed
6/16/2010	9:58:32 AM	PH3 valve closed
6/16/2010	9:58:32 AM	SiCl4 pre valve closed
6/16/2010	9:58:32 AM	SiCl4 post valve closed
6/16/2010	9:58:32 AM	Bubbler valve closed
6/16/2010	9:58:32 AM	Main Vac valve opened
6/16/2010	9:58:32 AM	Bypass valve opened
6/16/2010	9:58:32 AM	Helium MFC set to  0.000000
6/16/2010	9:58:32 AM	H2 MFC set to  0.000000
6/16/2010	9:58:32 AM	BCl3 MFC set to  0.000000
6/16/2010	9:58:32 AM	PHl3 MFC set to  0.000000
6/16/2010	9:58:32 AM	SiCl4 MFC set to  0.000000
6/16/2010	9:58:32 AM	Bypass solenoid MFC set to  0.000000
6/16/2010	9:58:32 AM	Tube furnace set to 0
6/16/2010	10:03:32 AM	Helium valve closed
6/16/2010	10:03:32 AM	H2 valve closed
6/16/2010	10:03:32 AM	BCl3 valve closed
6/16/2010	10:03:32 AM	PH3 valve closed
6/16/2010	10:03:32 AM	SiCl4 pre valve closed
6/16/2010	10:03:32 AM	SiCl4 post valve closed
6/16/2010	10:03:32 AM	Bubbler valve closed
6/16/2010	10:03:32 AM	Main Vac valve opened
6/16/2010	10:03:32 AM	Bypass valve opened
6/16/2010	10:03:32 AM	Helium MFC set to  0.000000
6/16/2010	10:03:32 AM	H2 MFC set to  0.000000
6/16/2010	10:03:32 AM	BCl3 MFC set to  0.000000
6/16/2010	10:03:32 AM	PHl3 MFC set to  0.000000
6/16/2010	10:03:32 AM	SiCl4 MFC set to  0.000000
6/16/2010	10:03:32 AM	Bypass solenoid MFC set to  0.000000
6/16/2010	10:03:32 AM	Tube furnace set to 0
6/16/2010	10:03:33 AM	Run finished at 10:03 AM
6/16/2010	10:03:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/16/2010	10:11:26 AM	Helium MFC set to  100.000000
6/16/2010	10:11:28 AM	Helium valve opened
6/16/2010	10:38:59 AM	Helium valve closed
6/16/2010	10:39:01 AM	Helium MFC set to  0.000000
6/16/2010	10:50:59 AM	Bypass valve closed
6/16/2010	10:50:59 AM	Main Vac valve closed
6/16/2010	10:51:16 AM	Bypass valve opened
6/16/2010	10:51:17 AM	Main Vac valve opened
6/16/2010	10:56:26 AM	Tube furnace set to 100
6/16/2010	10:58:19 AM	BCl3 MFC set to  100.000000
6/16/2010	10:58:23 AM	BCl3 MFC set to  0.000000
6/16/2010	11:01:11 AM	Tube furnace set to 0
6/16/2010	11:01:19 AM	Recipe started at 11:01 AM
6/16/2010	11:01:19 AM	Helium valve closed
6/16/2010	11:01:19 AM	BCl3 valve closed
6/16/2010	11:01:19 AM	PH3 valve closed
6/16/2010	11:01:19 AM	SiCl4 pre valve closed
6/16/2010	11:01:19 AM	SiCl4 post valve closed
6/16/2010	11:01:19 AM	Main Vac valve closed
6/16/2010	11:01:19 AM	Bypass valve closed
6/16/2010	11:01:19 AM	Bubbler valve closed
6/16/2010	11:01:19 AM	H2 valve opened
6/16/2010	11:01:19 AM	Helium MFC set to  0.000000
6/16/2010	11:01:19 AM	H2 MFC set to  500.000000
6/16/2010	11:01:19 AM	BCl3 MFC set to  0.000000
6/16/2010	11:01:19 AM	PHl3 MFC set to  0.000000
6/16/2010	11:01:19 AM	SiCl4 MFC set to  0.000000
6/16/2010	11:01:19 AM	Bypass solenoid MFC set to  0.000000
6/16/2010	11:01:20 AM	Tube furnace set to 0
6/16/2010	11:02:39 AM	Helium valve closed
6/16/2010	11:02:39 AM	BCl3 valve closed
6/16/2010	11:02:39 AM	PH3 valve closed
6/16/2010	11:02:39 AM	SiCl4 pre valve closed
6/16/2010	11:02:39 AM	SiCl4 post valve closed
6/16/2010	11:02:39 AM	Main Vac valve closed
6/16/2010	11:02:39 AM	Bypass valve closed
6/16/2010	11:02:39 AM	H2 valve opened
6/16/2010	11:02:39 AM	Bubbler valve opened
6/16/2010	11:02:39 AM	Helium MFC set to  0.000000
6/16/2010	11:02:39 AM	H2 MFC set to  500.000000
6/16/2010	11:02:39 AM	BCl3 MFC set to  0.000000
6/16/2010	11:02:39 AM	PHl3 MFC set to  0.000000
6/16/2010	11:02:39 AM	SiCl4 MFC set to  0.000000
6/16/2010	11:02:39 AM	Bypass solenoid MFC set to  0.000000
6/16/2010	11:02:39 AM	Tube furnace set to 1000
6/16/2010	11:22:39 AM	Helium valve closed
6/16/2010	11:22:39 AM	PH3 valve closed
6/16/2010	11:22:39 AM	Main Vac valve closed
6/16/2010	11:22:39 AM	Bypass valve closed
6/16/2010	11:22:39 AM	H2 valve opened
6/16/2010	11:22:39 AM	BCl3 valve opened
6/16/2010	11:22:39 AM	SiCl4 pre valve opened
6/16/2010	11:22:39 AM	SiCl4 post valve opened
6/16/2010	11:22:39 AM	Bubbler valve opened
6/16/2010	11:22:39 AM	Helium MFC set to  0.000000
6/16/2010	11:22:39 AM	H2 MFC set to  500.000000
6/16/2010	11:22:39 AM	BCl3 MFC set to  100.000000
6/16/2010	11:22:39 AM	PHl3 MFC set to  0.000000
6/16/2010	11:22:39 AM	SiCl4 MFC set to  50.000000
6/16/2010	11:22:39 AM	Bypass solenoid MFC set to  0.000000
6/16/2010	11:22:39 AM	Tube furnace set to 1000
6/16/2010	11:27:39 AM	H2 valve closed
6/16/2010	11:27:39 AM	BCl3 valve closed
6/16/2010	11:27:39 AM	PH3 valve closed
6/16/2010	11:27:39 AM	SiCl4 pre valve closed
6/16/2010	11:27:39 AM	SiCl4 post valve closed
6/16/2010	11:27:39 AM	Main Vac valve closed
6/16/2010	11:27:39 AM	Bypass valve closed
6/16/2010	11:27:39 AM	Helium valve opened
6/16/2010	11:27:39 AM	Bubbler valve opened
6/16/2010	11:27:39 AM	Helium MFC set to  500.000000
6/16/2010	11:27:39 AM	H2 MFC set to  0.000000
6/16/2010	11:27:39 AM	BCl3 MFC set to  0.000000
6/16/2010	11:27:39 AM	PHl3 MFC set to  0.000000
6/16/2010	11:27:39 AM	SiCl4 MFC set to  0.000000
6/16/2010	11:27:39 AM	Bypass solenoid MFC set to  0.000000
6/16/2010	11:27:39 AM	Tube furnace set to 0
6/16/2010	11:47:39 AM	Helium valve closed
6/16/2010	11:47:39 AM	H2 valve closed
6/16/2010	11:47:39 AM	BCl3 valve closed
6/16/2010	11:47:39 AM	PH3 valve closed
6/16/2010	11:47:39 AM	SiCl4 pre valve closed
6/16/2010	11:47:39 AM	SiCl4 post valve closed
6/16/2010	11:47:39 AM	Main Vac valve closed
6/16/2010	11:47:39 AM	Bypass valve closed
6/16/2010	11:47:39 AM	Bubbler valve closed
6/16/2010	11:47:39 AM	Helium MFC set to  0.000000
6/16/2010	11:47:39 AM	H2 MFC set to  0.000000
6/16/2010	11:47:39 AM	BCl3 MFC set to  0.000000
6/16/2010	11:47:39 AM	PHl3 MFC set to  0.000000
6/16/2010	11:47:39 AM	SiCl4 MFC set to  0.000000
6/16/2010	11:47:39 AM	Bypass solenoid MFC set to  0.000000
6/16/2010	11:47:40 AM	Tube furnace set to 0
6/16/2010	11:47:40 AM	Run finished at 11:47 AM
6/16/2010	2:43:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2010	2:43:14 PM	Recipe started at 2:43 PM
6/16/2010	2:43:14 PM	Helium valve closed
6/16/2010	2:43:14 PM	H2 valve closed
6/16/2010	2:43:14 PM	BCl3 valve closed
6/16/2010	2:43:14 PM	PH3 valve closed
6/16/2010	2:43:14 PM	SiCl4 pre valve closed
6/16/2010	2:43:14 PM	SiCl4 post valve closed
6/16/2010	2:43:14 PM	Main Vac valve closed
6/16/2010	2:43:14 PM	Bubbler valve closed
6/16/2010	2:43:14 PM	Bypass valve opened
6/16/2010	2:43:14 PM	Helium MFC set to  0.000000
6/16/2010	2:43:14 PM	H2 MFC set to  0.000000
6/16/2010	2:43:14 PM	BCl3 MFC set to  0.000000
6/16/2010	2:43:14 PM	PHl3 MFC set to  0.000000
6/16/2010	2:43:14 PM	SiCl4 MFC set to  0.000000
6/16/2010	2:43:14 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	2:43:14 PM	Tube furnace set to 0
6/16/2010	2:44:02 PM	Helium valve closed
6/16/2010	2:44:02 PM	H2 valve closed
6/16/2010	2:44:02 PM	BCl3 valve closed
6/16/2010	2:44:02 PM	PH3 valve closed
6/16/2010	2:44:02 PM	SiCl4 pre valve closed
6/16/2010	2:44:02 PM	SiCl4 post valve closed
6/16/2010	2:44:02 PM	Bubbler valve closed
6/16/2010	2:44:02 PM	Main Vac valve opened
6/16/2010	2:44:02 PM	Bypass valve opened
6/16/2010	2:44:02 PM	Helium MFC set to  0.000000
6/16/2010	2:44:02 PM	H2 MFC set to  0.000000
6/16/2010	2:44:02 PM	BCl3 MFC set to  0.000000
6/16/2010	2:44:02 PM	PHl3 MFC set to  0.000000
6/16/2010	2:44:02 PM	SiCl4 MFC set to  0.000000
6/16/2010	2:44:02 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	2:44:02 PM	Tube furnace set to 0
6/16/2010	2:44:02 PM	Run finished at 2:44 PM
6/16/2010	2:44:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2010	2:56:55 PM	Bypass valve closed
6/16/2010	2:56:56 PM	Main Vac valve closed
6/16/2010	3:51:38 PM	Bypass valve opened
6/16/2010	3:51:39 PM	Main Vac valve opened
6/16/2010	4:22:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/16/2010	4:22:24 PM	Recipe started at 4:22 PM
6/16/2010	4:22:24 PM	H2 valve closed
6/16/2010	4:22:24 PM	BCl3 valve closed
6/16/2010	4:22:24 PM	PH3 valve closed
6/16/2010	4:22:24 PM	SiCl4 pre valve closed
6/16/2010	4:22:24 PM	SiCl4 post valve closed
6/16/2010	4:22:24 PM	Main Vac valve closed
6/16/2010	4:22:24 PM	Bypass valve closed
6/16/2010	4:22:24 PM	Bubbler valve closed
6/16/2010	4:22:24 PM	Helium valve opened
6/16/2010	4:22:24 PM	Helium MFC set to  500.000000
6/16/2010	4:22:24 PM	H2 MFC set to  0.000000
6/16/2010	4:22:24 PM	BCl3 MFC set to  0.000000
6/16/2010	4:22:24 PM	PHl3 MFC set to  0.000000
6/16/2010	4:22:24 PM	SiCl4 MFC set to  0.000000
6/16/2010	4:22:24 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	4:22:24 PM	Tube furnace set to 0
6/16/2010	4:23:44 PM	Helium valve closed
6/16/2010	4:23:44 PM	H2 valve closed
6/16/2010	4:23:44 PM	BCl3 valve closed
6/16/2010	4:23:44 PM	PH3 valve closed
6/16/2010	4:23:44 PM	SiCl4 pre valve closed
6/16/2010	4:23:44 PM	SiCl4 post valve closed
6/16/2010	4:23:44 PM	Main Vac valve closed
6/16/2010	4:23:44 PM	Bypass valve closed
6/16/2010	4:23:44 PM	Bubbler valve closed
6/16/2010	4:23:44 PM	Helium MFC set to  0.000000
6/16/2010	4:23:44 PM	H2 MFC set to  0.000000
6/16/2010	4:23:44 PM	BCl3 MFC set to  0.000000
6/16/2010	4:23:44 PM	PHl3 MFC set to  0.000000
6/16/2010	4:23:44 PM	SiCl4 MFC set to  0.000000
6/16/2010	4:23:44 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	4:23:44 PM	Tube furnace set to 0
6/16/2010	4:23:44 PM	Run finished at 4:23 PM
6/16/2010	4:23:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/16/2010	4:28:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2010	4:28:22 PM	Recipe started at 4:28 PM
6/16/2010	4:28:22 PM	Helium valve closed
6/16/2010	4:28:22 PM	H2 valve closed
6/16/2010	4:28:22 PM	BCl3 valve closed
6/16/2010	4:28:22 PM	PH3 valve closed
6/16/2010	4:28:22 PM	SiCl4 pre valve closed
6/16/2010	4:28:22 PM	SiCl4 post valve closed
6/16/2010	4:28:22 PM	Main Vac valve closed
6/16/2010	4:28:22 PM	Bubbler valve closed
6/16/2010	4:28:22 PM	Bypass valve opened
6/16/2010	4:28:22 PM	Helium MFC set to  0.000000
6/16/2010	4:28:22 PM	H2 MFC set to  0.000000
6/16/2010	4:28:22 PM	BCl3 MFC set to  0.000000
6/16/2010	4:28:22 PM	PHl3 MFC set to  0.000000
6/16/2010	4:28:22 PM	SiCl4 MFC set to  0.000000
6/16/2010	4:28:22 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	4:28:22 PM	Tube furnace set to 0
6/16/2010	4:29:09 PM	Helium valve closed
6/16/2010	4:29:09 PM	H2 valve closed
6/16/2010	4:29:09 PM	BCl3 valve closed
6/16/2010	4:29:09 PM	PH3 valve closed
6/16/2010	4:29:09 PM	SiCl4 pre valve closed
6/16/2010	4:29:09 PM	SiCl4 post valve closed
6/16/2010	4:29:09 PM	Bubbler valve closed
6/16/2010	4:29:09 PM	Main Vac valve opened
6/16/2010	4:29:09 PM	Bypass valve opened
6/16/2010	4:29:09 PM	Helium MFC set to  0.000000
6/16/2010	4:29:10 PM	H2 MFC set to  0.000000
6/16/2010	4:29:10 PM	BCl3 MFC set to  0.000000
6/16/2010	4:29:10 PM	PHl3 MFC set to  0.000000
6/16/2010	4:29:10 PM	SiCl4 MFC set to  0.000000
6/16/2010	4:29:10 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	4:29:10 PM	Tube furnace set to 0
6/16/2010	4:29:10 PM	Run finished at 4:29 PM
6/16/2010	4:29:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2010	4:53:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/16/2010	4:53:29 PM	Recipe started at 4:53 PM
6/16/2010	4:53:29 PM	H2 valve closed
6/16/2010	4:53:29 PM	BCl3 valve closed
6/16/2010	4:53:29 PM	PH3 valve closed
6/16/2010	4:53:29 PM	SiCl4 pre valve closed
6/16/2010	4:53:29 PM	SiCl4 post valve closed
6/16/2010	4:53:29 PM	Main Vac valve closed
6/16/2010	4:53:29 PM	Bypass valve closed
6/16/2010	4:53:29 PM	Bubbler valve closed
6/16/2010	4:53:29 PM	Helium valve opened
6/16/2010	4:53:29 PM	Helium MFC set to  500.000000
6/16/2010	4:53:29 PM	H2 MFC set to  0.000000
6/16/2010	4:53:29 PM	BCl3 MFC set to  0.000000
6/16/2010	4:53:29 PM	PHl3 MFC set to  0.000000
6/16/2010	4:53:29 PM	SiCl4 MFC set to  0.000000
6/16/2010	4:53:29 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	4:53:29 PM	Tube furnace set to 0
6/16/2010	4:54:51 PM	Helium valve closed
6/16/2010	4:54:51 PM	H2 valve closed
6/16/2010	4:54:51 PM	BCl3 valve closed
6/16/2010	4:54:51 PM	PH3 valve closed
6/16/2010	4:54:51 PM	SiCl4 pre valve closed
6/16/2010	4:54:51 PM	SiCl4 post valve closed
6/16/2010	4:54:51 PM	Main Vac valve closed
6/16/2010	4:54:51 PM	Bypass valve closed
6/16/2010	4:54:51 PM	Bubbler valve closed
6/16/2010	4:54:51 PM	Helium MFC set to  0.000000
6/16/2010	4:54:51 PM	H2 MFC set to  0.000000
6/16/2010	4:54:51 PM	BCl3 MFC set to  0.000000
6/16/2010	4:54:51 PM	PHl3 MFC set to  0.000000
6/16/2010	4:54:51 PM	SiCl4 MFC set to  0.000000
6/16/2010	4:54:51 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	4:54:51 PM	Tube furnace set to 0
6/16/2010	4:55:06 PM	Helium valve closed
6/16/2010	4:55:06 PM	H2 valve closed
6/16/2010	4:55:06 PM	BCl3 valve closed
6/16/2010	4:55:06 PM	PH3 valve closed
6/16/2010	4:55:06 PM	SiCl4 pre valve closed
6/16/2010	4:55:06 PM	SiCl4 post valve closed
6/16/2010	4:55:06 PM	Main Vac valve closed
6/16/2010	4:55:06 PM	Bubbler valve closed
6/16/2010	4:55:06 PM	Bypass valve opened
6/16/2010	4:55:06 PM	Helium MFC set to  0.000000
6/16/2010	4:55:06 PM	H2 MFC set to  0.000000
6/16/2010	4:55:06 PM	BCl3 MFC set to  0.000000
6/16/2010	4:55:06 PM	PHl3 MFC set to  0.000000
6/16/2010	4:55:06 PM	SiCl4 MFC set to  0.000000
6/16/2010	4:55:06 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	4:55:06 PM	Tube furnace set to 0
6/16/2010	4:55:40 PM	Helium valve closed
6/16/2010	4:55:40 PM	H2 valve closed
6/16/2010	4:55:40 PM	BCl3 valve closed
6/16/2010	4:55:40 PM	PH3 valve closed
6/16/2010	4:55:40 PM	SiCl4 pre valve closed
6/16/2010	4:55:40 PM	SiCl4 post valve closed
6/16/2010	4:55:40 PM	Bubbler valve closed
6/16/2010	4:55:40 PM	Main Vac valve opened
6/16/2010	4:55:40 PM	Bypass valve opened
6/16/2010	4:55:40 PM	Helium MFC set to  0.000000
6/16/2010	4:55:40 PM	H2 MFC set to  0.000000
6/16/2010	4:55:40 PM	BCl3 MFC set to  0.000000
6/16/2010	4:55:40 PM	PHl3 MFC set to  0.000000
6/16/2010	4:55:40 PM	SiCl4 MFC set to  0.000000
6/16/2010	4:55:40 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	4:55:40 PM	Tube furnace set to 0
6/16/2010	5:00:40 PM	H2 valve closed
6/16/2010	5:00:40 PM	BCl3 valve closed
6/16/2010	5:00:40 PM	PH3 valve closed
6/16/2010	5:00:40 PM	SiCl4 pre valve closed
6/16/2010	5:00:40 PM	SiCl4 post valve closed
6/16/2010	5:00:40 PM	Main Vac valve closed
6/16/2010	5:00:40 PM	Bypass valve closed
6/16/2010	5:00:40 PM	Bubbler valve closed
6/16/2010	5:00:40 PM	Helium valve opened
6/16/2010	5:00:40 PM	Helium MFC set to  500.000000
6/16/2010	5:00:40 PM	H2 MFC set to  0.000000
6/16/2010	5:00:40 PM	BCl3 MFC set to  0.000000
6/16/2010	5:00:40 PM	PHl3 MFC set to  0.000000
6/16/2010	5:00:40 PM	SiCl4 MFC set to  0.000000
6/16/2010	5:00:40 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	5:00:40 PM	Tube furnace set to 0
6/16/2010	5:02:02 PM	Helium valve closed
6/16/2010	5:02:02 PM	H2 valve closed
6/16/2010	5:02:02 PM	BCl3 valve closed
6/16/2010	5:02:02 PM	PH3 valve closed
6/16/2010	5:02:02 PM	SiCl4 pre valve closed
6/16/2010	5:02:02 PM	SiCl4 post valve closed
6/16/2010	5:02:02 PM	Main Vac valve closed
6/16/2010	5:02:02 PM	Bypass valve closed
6/16/2010	5:02:02 PM	Bubbler valve closed
6/16/2010	5:02:02 PM	Helium MFC set to  0.000000
6/16/2010	5:02:02 PM	H2 MFC set to  0.000000
6/16/2010	5:02:02 PM	BCl3 MFC set to  0.000000
6/16/2010	5:02:02 PM	PHl3 MFC set to  0.000000
6/16/2010	5:02:02 PM	SiCl4 MFC set to  0.000000
6/16/2010	5:02:02 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	5:02:02 PM	Tube furnace set to 0
6/16/2010	5:02:17 PM	Helium valve closed
6/16/2010	5:02:17 PM	H2 valve closed
6/16/2010	5:02:17 PM	BCl3 valve closed
6/16/2010	5:02:17 PM	PH3 valve closed
6/16/2010	5:02:17 PM	SiCl4 pre valve closed
6/16/2010	5:02:17 PM	SiCl4 post valve closed
6/16/2010	5:02:17 PM	Main Vac valve closed
6/16/2010	5:02:17 PM	Bubbler valve closed
6/16/2010	5:02:17 PM	Bypass valve opened
6/16/2010	5:02:17 PM	Helium MFC set to  0.000000
6/16/2010	5:02:17 PM	H2 MFC set to  0.000000
6/16/2010	5:02:17 PM	BCl3 MFC set to  0.000000
6/16/2010	5:02:17 PM	PHl3 MFC set to  0.000000
6/16/2010	5:02:17 PM	SiCl4 MFC set to  0.000000
6/16/2010	5:02:17 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	5:02:17 PM	Tube furnace set to 0
6/16/2010	5:02:51 PM	Helium valve closed
6/16/2010	5:02:51 PM	H2 valve closed
6/16/2010	5:02:51 PM	BCl3 valve closed
6/16/2010	5:02:51 PM	PH3 valve closed
6/16/2010	5:02:51 PM	SiCl4 pre valve closed
6/16/2010	5:02:51 PM	SiCl4 post valve closed
6/16/2010	5:02:51 PM	Bubbler valve closed
6/16/2010	5:02:51 PM	Main Vac valve opened
6/16/2010	5:02:51 PM	Bypass valve opened
6/16/2010	5:02:51 PM	Helium MFC set to  0.000000
6/16/2010	5:02:51 PM	H2 MFC set to  0.000000
6/16/2010	5:02:51 PM	BCl3 MFC set to  0.000000
6/16/2010	5:02:51 PM	PHl3 MFC set to  0.000000
6/16/2010	5:02:51 PM	SiCl4 MFC set to  0.000000
6/16/2010	5:02:51 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	5:02:51 PM	Tube furnace set to 0
6/16/2010	5:07:51 PM	H2 valve closed
6/16/2010	5:07:51 PM	BCl3 valve closed
6/16/2010	5:07:51 PM	PH3 valve closed
6/16/2010	5:07:51 PM	SiCl4 pre valve closed
6/16/2010	5:07:51 PM	SiCl4 post valve closed
6/16/2010	5:07:51 PM	Main Vac valve closed
6/16/2010	5:07:51 PM	Bypass valve closed
6/16/2010	5:07:51 PM	Bubbler valve closed
6/16/2010	5:07:51 PM	Helium valve opened
6/16/2010	5:07:51 PM	Helium MFC set to  500.000000
6/16/2010	5:07:51 PM	H2 MFC set to  0.000000
6/16/2010	5:07:51 PM	BCl3 MFC set to  0.000000
6/16/2010	5:07:51 PM	PHl3 MFC set to  0.000000
6/16/2010	5:07:51 PM	SiCl4 MFC set to  0.000000
6/16/2010	5:07:51 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	5:07:51 PM	Tube furnace set to 0
6/16/2010	5:09:13 PM	Helium valve closed
6/16/2010	5:09:13 PM	H2 valve closed
6/16/2010	5:09:13 PM	BCl3 valve closed
6/16/2010	5:09:13 PM	PH3 valve closed
6/16/2010	5:09:13 PM	SiCl4 pre valve closed
6/16/2010	5:09:13 PM	SiCl4 post valve closed
6/16/2010	5:09:13 PM	Main Vac valve closed
6/16/2010	5:09:13 PM	Bypass valve closed
6/16/2010	5:09:13 PM	Bubbler valve closed
6/16/2010	5:09:13 PM	Helium MFC set to  0.000000
6/16/2010	5:09:13 PM	H2 MFC set to  0.000000
6/16/2010	5:09:13 PM	BCl3 MFC set to  0.000000
6/16/2010	5:09:13 PM	PHl3 MFC set to  0.000000
6/16/2010	5:09:13 PM	SiCl4 MFC set to  0.000000
6/16/2010	5:09:13 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	5:09:13 PM	Tube furnace set to 0
6/16/2010	5:09:28 PM	Helium valve closed
6/16/2010	5:09:28 PM	H2 valve closed
6/16/2010	5:09:28 PM	BCl3 valve closed
6/16/2010	5:09:28 PM	PH3 valve closed
6/16/2010	5:09:28 PM	SiCl4 pre valve closed
6/16/2010	5:09:28 PM	SiCl4 post valve closed
6/16/2010	5:09:28 PM	Main Vac valve closed
6/16/2010	5:09:28 PM	Bubbler valve closed
6/16/2010	5:09:28 PM	Bypass valve opened
6/16/2010	5:09:28 PM	Helium MFC set to  0.000000
6/16/2010	5:09:28 PM	H2 MFC set to  0.000000
6/16/2010	5:09:28 PM	BCl3 MFC set to  0.000000
6/16/2010	5:09:28 PM	PHl3 MFC set to  0.000000
6/16/2010	5:09:28 PM	SiCl4 MFC set to  0.000000
6/16/2010	5:09:28 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	5:09:28 PM	Tube furnace set to 0
6/16/2010	5:10:02 PM	Helium valve closed
6/16/2010	5:10:02 PM	H2 valve closed
6/16/2010	5:10:02 PM	BCl3 valve closed
6/16/2010	5:10:02 PM	PH3 valve closed
6/16/2010	5:10:02 PM	SiCl4 pre valve closed
6/16/2010	5:10:02 PM	SiCl4 post valve closed
6/16/2010	5:10:02 PM	Bubbler valve closed
6/16/2010	5:10:02 PM	Main Vac valve opened
6/16/2010	5:10:02 PM	Bypass valve opened
6/16/2010	5:10:02 PM	Helium MFC set to  0.000000
6/16/2010	5:10:02 PM	H2 MFC set to  0.000000
6/16/2010	5:10:02 PM	BCl3 MFC set to  0.000000
6/16/2010	5:10:02 PM	PHl3 MFC set to  0.000000
6/16/2010	5:10:02 PM	SiCl4 MFC set to  0.000000
6/16/2010	5:10:02 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	5:10:02 PM	Tube furnace set to 0
6/16/2010	5:15:02 PM	Helium valve closed
6/16/2010	5:15:02 PM	H2 valve closed
6/16/2010	5:15:02 PM	BCl3 valve closed
6/16/2010	5:15:02 PM	PH3 valve closed
6/16/2010	5:15:02 PM	SiCl4 pre valve closed
6/16/2010	5:15:02 PM	SiCl4 post valve closed
6/16/2010	5:15:02 PM	Bubbler valve closed
6/16/2010	5:15:02 PM	Main Vac valve opened
6/16/2010	5:15:02 PM	Bypass valve opened
6/16/2010	5:15:02 PM	Helium MFC set to  0.000000
6/16/2010	5:15:02 PM	H2 MFC set to  0.000000
6/16/2010	5:15:02 PM	BCl3 MFC set to  0.000000
6/16/2010	5:15:02 PM	PHl3 MFC set to  0.000000
6/16/2010	5:15:02 PM	SiCl4 MFC set to  0.000000
6/16/2010	5:15:02 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	5:15:02 PM	Tube furnace set to 0
6/16/2010	5:15:03 PM	Run finished at 5:15 PM
6/16/2010	5:15:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/16/2010	6:02:17 PM	Bypass valve closed
6/16/2010	6:02:18 PM	Main Vac valve closed
6/16/2010	6:03:10 PM	Bypass valve opened
6/16/2010	6:03:10 PM	Main Vac valve opened
6/16/2010	6:10:49 PM	Tube furnace set to 100
6/16/2010	6:14:25 PM	Tube furnace set to 0
6/16/2010	6:14:29 PM	Recipe started at 6:14 PM
6/16/2010	6:14:29 PM	Helium valve closed
6/16/2010	6:14:29 PM	BCl3 valve closed
6/16/2010	6:14:29 PM	PH3 valve closed
6/16/2010	6:14:29 PM	SiCl4 pre valve closed
6/16/2010	6:14:29 PM	SiCl4 post valve closed
6/16/2010	6:14:29 PM	Main Vac valve closed
6/16/2010	6:14:29 PM	Bypass valve closed
6/16/2010	6:14:29 PM	Bubbler valve closed
6/16/2010	6:14:29 PM	H2 valve opened
6/16/2010	6:14:29 PM	Helium MFC set to  0.000000
6/16/2010	6:14:29 PM	H2 MFC set to  500.000000
6/16/2010	6:14:29 PM	BCl3 MFC set to  0.000000
6/16/2010	6:14:29 PM	PHl3 MFC set to  0.000000
6/16/2010	6:14:29 PM	SiCl4 MFC set to  0.000000
6/16/2010	6:14:29 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	6:14:29 PM	Tube furnace set to 0
6/16/2010	6:15:50 PM	Helium valve closed
6/16/2010	6:15:50 PM	BCl3 valve closed
6/16/2010	6:15:50 PM	PH3 valve closed
6/16/2010	6:15:50 PM	SiCl4 pre valve closed
6/16/2010	6:15:50 PM	SiCl4 post valve closed
6/16/2010	6:15:50 PM	Main Vac valve closed
6/16/2010	6:15:50 PM	Bypass valve closed
6/16/2010	6:15:50 PM	H2 valve opened
6/16/2010	6:15:50 PM	Bubbler valve opened
6/16/2010	6:15:50 PM	Helium MFC set to  0.000000
6/16/2010	6:15:50 PM	H2 MFC set to  500.000000
6/16/2010	6:15:50 PM	BCl3 MFC set to  0.000000
6/16/2010	6:15:50 PM	PHl3 MFC set to  0.000000
6/16/2010	6:15:50 PM	SiCl4 MFC set to  0.000000
6/16/2010	6:15:50 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	6:15:50 PM	Tube furnace set to 1000
6/16/2010	6:24:37 PM	Helium valve closed
6/16/2010	6:24:37 PM	PH3 valve closed
6/16/2010	6:24:37 PM	Main Vac valve closed
6/16/2010	6:24:37 PM	Bypass valve closed
6/16/2010	6:24:37 PM	H2 valve opened
6/16/2010	6:24:37 PM	BCl3 valve opened
6/16/2010	6:24:37 PM	SiCl4 pre valve opened
6/16/2010	6:24:37 PM	SiCl4 post valve opened
6/16/2010	6:24:37 PM	Bubbler valve opened
6/16/2010	6:24:37 PM	Helium MFC set to  0.000000
6/16/2010	6:24:37 PM	H2 MFC set to  500.000000
6/16/2010	6:24:37 PM	BCl3 MFC set to  35.000000
6/16/2010	6:24:37 PM	PHl3 MFC set to  0.000000
6/16/2010	6:24:37 PM	SiCl4 MFC set to  50.000000
6/16/2010	6:24:37 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	6:24:37 PM	Tube furnace set to 1000
6/16/2010	6:27:53 PM	Helium valve closed
6/16/2010	6:27:53 PM	PH3 valve closed
6/16/2010	6:27:53 PM	Main Vac valve closed
6/16/2010	6:27:53 PM	Bypass valve closed
6/16/2010	6:27:53 PM	H2 valve opened
6/16/2010	6:27:53 PM	BCl3 valve opened
6/16/2010	6:27:53 PM	SiCl4 pre valve opened
6/16/2010	6:27:53 PM	SiCl4 post valve opened
6/16/2010	6:27:53 PM	Bubbler valve opened
6/16/2010	6:27:53 PM	Helium MFC set to  0.000000
6/16/2010	6:27:53 PM	H2 MFC set to  500.000000
6/16/2010	6:27:53 PM	BCl3 MFC set to  35.000000
6/16/2010	6:27:53 PM	PHl3 MFC set to  0.000000
6/16/2010	6:27:53 PM	SiCl4 MFC set to  50.000000
6/16/2010	6:27:53 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	6:27:53 PM	Tube furnace set to 1000
6/16/2010	6:32:53 PM	H2 valve closed
6/16/2010	6:32:53 PM	BCl3 valve closed
6/16/2010	6:32:53 PM	PH3 valve closed
6/16/2010	6:32:53 PM	SiCl4 pre valve closed
6/16/2010	6:32:53 PM	SiCl4 post valve closed
6/16/2010	6:32:53 PM	Main Vac valve closed
6/16/2010	6:32:53 PM	Bypass valve closed
6/16/2010	6:32:53 PM	Helium valve opened
6/16/2010	6:32:53 PM	Bubbler valve opened
6/16/2010	6:32:53 PM	Helium MFC set to  500.000000
6/16/2010	6:32:53 PM	H2 MFC set to  0.000000
6/16/2010	6:32:53 PM	BCl3 MFC set to  0.000000
6/16/2010	6:32:53 PM	PHl3 MFC set to  0.000000
6/16/2010	6:32:53 PM	SiCl4 MFC set to  0.000000
6/16/2010	6:32:53 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	6:32:53 PM	Tube furnace set to 0
6/16/2010	6:52:53 PM	Helium valve closed
6/16/2010	6:52:53 PM	H2 valve closed
6/16/2010	6:52:53 PM	BCl3 valve closed
6/16/2010	6:52:53 PM	PH3 valve closed
6/16/2010	6:52:53 PM	SiCl4 pre valve closed
6/16/2010	6:52:53 PM	SiCl4 post valve closed
6/16/2010	6:52:53 PM	Main Vac valve closed
6/16/2010	6:52:53 PM	Bypass valve closed
6/16/2010	6:52:53 PM	Bubbler valve closed
6/16/2010	6:52:53 PM	Helium MFC set to  0.000000
6/16/2010	6:52:53 PM	H2 MFC set to  0.000000
6/16/2010	6:52:53 PM	BCl3 MFC set to  0.000000
6/16/2010	6:52:53 PM	PHl3 MFC set to  0.000000
6/16/2010	6:52:53 PM	SiCl4 MFC set to  0.000000
6/16/2010	6:52:53 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	6:52:53 PM	Tube furnace set to 0
6/16/2010	6:52:54 PM	Run finished at 6:52 PM
6/16/2010	7:58:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2010	7:58:47 PM	Recipe started at 7:58 PM
6/16/2010	7:58:47 PM	Helium valve closed
6/16/2010	7:58:47 PM	H2 valve closed
6/16/2010	7:58:47 PM	BCl3 valve closed
6/16/2010	7:58:47 PM	PH3 valve closed
6/16/2010	7:58:47 PM	SiCl4 pre valve closed
6/16/2010	7:58:47 PM	SiCl4 post valve closed
6/16/2010	7:58:47 PM	Main Vac valve closed
6/16/2010	7:58:47 PM	Bubbler valve closed
6/16/2010	7:58:47 PM	Bypass valve opened
6/16/2010	7:58:47 PM	Helium MFC set to  0.000000
6/16/2010	7:58:47 PM	H2 MFC set to  0.000000
6/16/2010	7:58:47 PM	BCl3 MFC set to  0.000000
6/16/2010	7:58:47 PM	PHl3 MFC set to  0.000000
6/16/2010	7:58:47 PM	SiCl4 MFC set to  0.000000
6/16/2010	7:58:47 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	7:58:47 PM	Tube furnace set to 0
6/16/2010	7:59:35 PM	Helium valve closed
6/16/2010	7:59:35 PM	H2 valve closed
6/16/2010	7:59:35 PM	BCl3 valve closed
6/16/2010	7:59:35 PM	PH3 valve closed
6/16/2010	7:59:35 PM	SiCl4 pre valve closed
6/16/2010	7:59:35 PM	SiCl4 post valve closed
6/16/2010	7:59:35 PM	Bubbler valve closed
6/16/2010	7:59:35 PM	Main Vac valve opened
6/16/2010	7:59:35 PM	Bypass valve opened
6/16/2010	7:59:35 PM	Helium MFC set to  0.000000
6/16/2010	7:59:35 PM	H2 MFC set to  0.000000
6/16/2010	7:59:35 PM	BCl3 MFC set to  0.000000
6/16/2010	7:59:35 PM	PHl3 MFC set to  0.000000
6/16/2010	7:59:35 PM	SiCl4 MFC set to  0.000000
6/16/2010	7:59:35 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	7:59:35 PM	Tube furnace set to 0
6/16/2010	7:59:36 PM	Run finished at 7:59 PM
6/16/2010	7:59:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2010	8:32:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/16/2010	8:32:14 PM	Recipe started at 8:32 PM
6/16/2010	8:32:14 PM	H2 valve closed
6/16/2010	8:32:14 PM	BCl3 valve closed
6/16/2010	8:32:14 PM	PH3 valve closed
6/16/2010	8:32:14 PM	SiCl4 pre valve closed
6/16/2010	8:32:14 PM	SiCl4 post valve closed
6/16/2010	8:32:14 PM	Main Vac valve closed
6/16/2010	8:32:14 PM	Bypass valve closed
6/16/2010	8:32:14 PM	Bubbler valve closed
6/16/2010	8:32:14 PM	Helium valve opened
6/16/2010	8:32:14 PM	Helium MFC set to  500.000000
6/16/2010	8:32:14 PM	H2 MFC set to  0.000000
6/16/2010	8:32:14 PM	BCl3 MFC set to  0.000000
6/16/2010	8:32:14 PM	PHl3 MFC set to  0.000000
6/16/2010	8:32:14 PM	SiCl4 MFC set to  0.000000
6/16/2010	8:32:14 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	8:32:14 PM	Tube furnace set to 0
6/16/2010	8:33:33 PM	Helium valve closed
6/16/2010	8:33:33 PM	H2 valve closed
6/16/2010	8:33:33 PM	BCl3 valve closed
6/16/2010	8:33:33 PM	PH3 valve closed
6/16/2010	8:33:33 PM	SiCl4 pre valve closed
6/16/2010	8:33:33 PM	SiCl4 post valve closed
6/16/2010	8:33:33 PM	Main Vac valve closed
6/16/2010	8:33:33 PM	Bypass valve closed
6/16/2010	8:33:33 PM	Bubbler valve closed
6/16/2010	8:33:33 PM	Helium MFC set to  0.000000
6/16/2010	8:33:33 PM	H2 MFC set to  0.000000
6/16/2010	8:33:33 PM	BCl3 MFC set to  0.000000
6/16/2010	8:33:33 PM	PHl3 MFC set to  0.000000
6/16/2010	8:33:33 PM	SiCl4 MFC set to  0.000000
6/16/2010	8:33:33 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	8:33:33 PM	Tube furnace set to 0
6/16/2010	8:33:34 PM	Run finished at 8:33 PM
6/16/2010	8:33:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/16/2010	8:37:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2010	8:37:15 PM	Recipe started at 8:37 PM
6/16/2010	8:37:15 PM	Helium valve closed
6/16/2010	8:37:15 PM	H2 valve closed
6/16/2010	8:37:15 PM	BCl3 valve closed
6/16/2010	8:37:15 PM	PH3 valve closed
6/16/2010	8:37:15 PM	SiCl4 pre valve closed
6/16/2010	8:37:15 PM	SiCl4 post valve closed
6/16/2010	8:37:15 PM	Main Vac valve closed
6/16/2010	8:37:15 PM	Bubbler valve closed
6/16/2010	8:37:15 PM	Bypass valve opened
6/16/2010	8:37:15 PM	Helium MFC set to  0.000000
6/16/2010	8:37:15 PM	H2 MFC set to  0.000000
6/16/2010	8:37:15 PM	BCl3 MFC set to  0.000000
6/16/2010	8:37:15 PM	PHl3 MFC set to  0.000000
6/16/2010	8:37:15 PM	SiCl4 MFC set to  0.000000
6/16/2010	8:37:15 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	8:37:15 PM	Tube furnace set to 0
6/16/2010	8:38:02 PM	Helium valve closed
6/16/2010	8:38:02 PM	H2 valve closed
6/16/2010	8:38:02 PM	BCl3 valve closed
6/16/2010	8:38:02 PM	PH3 valve closed
6/16/2010	8:38:02 PM	SiCl4 pre valve closed
6/16/2010	8:38:02 PM	SiCl4 post valve closed
6/16/2010	8:38:02 PM	Bubbler valve closed
6/16/2010	8:38:02 PM	Main Vac valve opened
6/16/2010	8:38:02 PM	Bypass valve opened
6/16/2010	8:38:02 PM	Helium MFC set to  0.000000
6/16/2010	8:38:02 PM	H2 MFC set to  0.000000
6/16/2010	8:38:02 PM	BCl3 MFC set to  0.000000
6/16/2010	8:38:02 PM	PHl3 MFC set to  0.000000
6/16/2010	8:38:02 PM	SiCl4 MFC set to  0.000000
6/16/2010	8:38:02 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	8:38:02 PM	Tube furnace set to 0
6/16/2010	8:38:02 PM	Run finished at 8:38 PM
6/16/2010	8:38:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/16/2010	8:43:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/16/2010	8:43:09 PM	Recipe started at 8:43 PM
6/16/2010	8:43:09 PM	H2 valve closed
6/16/2010	8:43:09 PM	BCl3 valve closed
6/16/2010	8:43:09 PM	PH3 valve closed
6/16/2010	8:43:09 PM	SiCl4 pre valve closed
6/16/2010	8:43:09 PM	SiCl4 post valve closed
6/16/2010	8:43:09 PM	Main Vac valve closed
6/16/2010	8:43:09 PM	Bypass valve closed
6/16/2010	8:43:09 PM	Bubbler valve closed
6/16/2010	8:43:09 PM	Helium valve opened
6/16/2010	8:43:09 PM	Helium MFC set to  500.000000
6/16/2010	8:43:09 PM	H2 MFC set to  0.000000
6/16/2010	8:43:09 PM	BCl3 MFC set to  0.000000
6/16/2010	8:43:09 PM	PHl3 MFC set to  0.000000
6/16/2010	8:43:09 PM	SiCl4 MFC set to  0.000000
6/16/2010	8:43:09 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	8:43:09 PM	Tube furnace set to 0
6/16/2010	8:44:30 PM	Helium valve closed
6/16/2010	8:44:30 PM	H2 valve closed
6/16/2010	8:44:30 PM	BCl3 valve closed
6/16/2010	8:44:30 PM	PH3 valve closed
6/16/2010	8:44:31 PM	SiCl4 pre valve closed
6/16/2010	8:44:31 PM	SiCl4 post valve closed
6/16/2010	8:44:31 PM	Main Vac valve closed
6/16/2010	8:44:31 PM	Bypass valve closed
6/16/2010	8:44:31 PM	Bubbler valve closed
6/16/2010	8:44:31 PM	Helium MFC set to  0.000000
6/16/2010	8:44:31 PM	H2 MFC set to  0.000000
6/16/2010	8:44:31 PM	BCl3 MFC set to  0.000000
6/16/2010	8:44:31 PM	PHl3 MFC set to  0.000000
6/16/2010	8:44:31 PM	SiCl4 MFC set to  0.000000
6/16/2010	8:44:31 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	8:44:31 PM	Tube furnace set to 0
6/16/2010	8:44:46 PM	Helium valve closed
6/16/2010	8:44:46 PM	H2 valve closed
6/16/2010	8:44:46 PM	BCl3 valve closed
6/16/2010	8:44:46 PM	PH3 valve closed
6/16/2010	8:44:46 PM	SiCl4 pre valve closed
6/16/2010	8:44:46 PM	SiCl4 post valve closed
6/16/2010	8:44:46 PM	Main Vac valve closed
6/16/2010	8:44:46 PM	Bubbler valve closed
6/16/2010	8:44:46 PM	Bypass valve opened
6/16/2010	8:44:46 PM	Helium MFC set to  0.000000
6/16/2010	8:44:46 PM	H2 MFC set to  0.000000
6/16/2010	8:44:46 PM	BCl3 MFC set to  0.000000
6/16/2010	8:44:46 PM	PHl3 MFC set to  0.000000
6/16/2010	8:44:46 PM	SiCl4 MFC set to  0.000000
6/16/2010	8:44:46 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	8:44:46 PM	Tube furnace set to 0
6/16/2010	8:45:20 PM	Helium valve closed
6/16/2010	8:45:20 PM	H2 valve closed
6/16/2010	8:45:20 PM	BCl3 valve closed
6/16/2010	8:45:20 PM	PH3 valve closed
6/16/2010	8:45:20 PM	SiCl4 pre valve closed
6/16/2010	8:45:20 PM	SiCl4 post valve closed
6/16/2010	8:45:20 PM	Bubbler valve closed
6/16/2010	8:45:20 PM	Main Vac valve opened
6/16/2010	8:45:20 PM	Bypass valve opened
6/16/2010	8:45:20 PM	Helium MFC set to  0.000000
6/16/2010	8:45:20 PM	H2 MFC set to  0.000000
6/16/2010	8:45:20 PM	BCl3 MFC set to  0.000000
6/16/2010	8:45:20 PM	PHl3 MFC set to  0.000000
6/16/2010	8:45:20 PM	SiCl4 MFC set to  0.000000
6/16/2010	8:45:20 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	8:45:20 PM	Tube furnace set to 0
6/16/2010	8:50:20 PM	H2 valve closed
6/16/2010	8:50:20 PM	BCl3 valve closed
6/16/2010	8:50:20 PM	PH3 valve closed
6/16/2010	8:50:20 PM	SiCl4 pre valve closed
6/16/2010	8:50:20 PM	SiCl4 post valve closed
6/16/2010	8:50:20 PM	Main Vac valve closed
6/16/2010	8:50:20 PM	Bypass valve closed
6/16/2010	8:50:20 PM	Bubbler valve closed
6/16/2010	8:50:20 PM	Helium valve opened
6/16/2010	8:50:20 PM	Helium MFC set to  500.000000
6/16/2010	8:50:20 PM	H2 MFC set to  0.000000
6/16/2010	8:50:20 PM	BCl3 MFC set to  0.000000
6/16/2010	8:50:20 PM	PHl3 MFC set to  0.000000
6/16/2010	8:50:20 PM	SiCl4 MFC set to  0.000000
6/16/2010	8:50:20 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	8:50:20 PM	Tube furnace set to 0
6/16/2010	8:51:41 PM	Helium valve closed
6/16/2010	8:51:41 PM	H2 valve closed
6/16/2010	8:51:41 PM	BCl3 valve closed
6/16/2010	8:51:41 PM	PH3 valve closed
6/16/2010	8:51:41 PM	SiCl4 pre valve closed
6/16/2010	8:51:41 PM	SiCl4 post valve closed
6/16/2010	8:51:41 PM	Main Vac valve closed
6/16/2010	8:51:41 PM	Bypass valve closed
6/16/2010	8:51:41 PM	Bubbler valve closed
6/16/2010	8:51:41 PM	Helium MFC set to  0.000000
6/16/2010	8:51:41 PM	H2 MFC set to  0.000000
6/16/2010	8:51:41 PM	BCl3 MFC set to  0.000000
6/16/2010	8:51:41 PM	PHl3 MFC set to  0.000000
6/16/2010	8:51:41 PM	SiCl4 MFC set to  0.000000
6/16/2010	8:51:41 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	8:51:41 PM	Tube furnace set to 0
6/16/2010	8:51:56 PM	Helium valve closed
6/16/2010	8:51:56 PM	H2 valve closed
6/16/2010	8:51:56 PM	BCl3 valve closed
6/16/2010	8:51:56 PM	PH3 valve closed
6/16/2010	8:51:56 PM	SiCl4 pre valve closed
6/16/2010	8:51:56 PM	SiCl4 post valve closed
6/16/2010	8:51:56 PM	Main Vac valve closed
6/16/2010	8:51:56 PM	Bubbler valve closed
6/16/2010	8:51:56 PM	Bypass valve opened
6/16/2010	8:51:56 PM	Helium MFC set to  0.000000
6/16/2010	8:51:56 PM	H2 MFC set to  0.000000
6/16/2010	8:51:56 PM	BCl3 MFC set to  0.000000
6/16/2010	8:51:56 PM	PHl3 MFC set to  0.000000
6/16/2010	8:51:56 PM	SiCl4 MFC set to  0.000000
6/16/2010	8:51:56 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	8:51:57 PM	Tube furnace set to 0
6/16/2010	8:52:30 PM	Helium valve closed
6/16/2010	8:52:30 PM	H2 valve closed
6/16/2010	8:52:30 PM	BCl3 valve closed
6/16/2010	8:52:30 PM	PH3 valve closed
6/16/2010	8:52:30 PM	SiCl4 pre valve closed
6/16/2010	8:52:30 PM	SiCl4 post valve closed
6/16/2010	8:52:30 PM	Bubbler valve closed
6/16/2010	8:52:30 PM	Main Vac valve opened
6/16/2010	8:52:30 PM	Bypass valve opened
6/16/2010	8:52:30 PM	Helium MFC set to  0.000000
6/16/2010	8:52:30 PM	H2 MFC set to  0.000000
6/16/2010	8:52:30 PM	BCl3 MFC set to  0.000000
6/16/2010	8:52:30 PM	PHl3 MFC set to  0.000000
6/16/2010	8:52:30 PM	SiCl4 MFC set to  0.000000
6/16/2010	8:52:30 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	8:52:31 PM	Tube furnace set to 0
6/16/2010	8:57:31 PM	H2 valve closed
6/16/2010	8:57:31 PM	BCl3 valve closed
6/16/2010	8:57:31 PM	PH3 valve closed
6/16/2010	8:57:31 PM	SiCl4 pre valve closed
6/16/2010	8:57:31 PM	SiCl4 post valve closed
6/16/2010	8:57:31 PM	Main Vac valve closed
6/16/2010	8:57:31 PM	Bypass valve closed
6/16/2010	8:57:31 PM	Bubbler valve closed
6/16/2010	8:57:31 PM	Helium valve opened
6/16/2010	8:57:31 PM	Helium MFC set to  500.000000
6/16/2010	8:57:31 PM	H2 MFC set to  0.000000
6/16/2010	8:57:31 PM	BCl3 MFC set to  0.000000
6/16/2010	8:57:31 PM	PHl3 MFC set to  0.000000
6/16/2010	8:57:31 PM	SiCl4 MFC set to  0.000000
6/16/2010	8:57:31 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	8:57:31 PM	Tube furnace set to 0
6/16/2010	8:58:52 PM	Helium valve closed
6/16/2010	8:58:52 PM	H2 valve closed
6/16/2010	8:58:52 PM	BCl3 valve closed
6/16/2010	8:58:52 PM	PH3 valve closed
6/16/2010	8:58:52 PM	SiCl4 pre valve closed
6/16/2010	8:58:52 PM	SiCl4 post valve closed
6/16/2010	8:58:52 PM	Main Vac valve closed
6/16/2010	8:58:52 PM	Bypass valve closed
6/16/2010	8:58:52 PM	Bubbler valve closed
6/16/2010	8:58:52 PM	Helium MFC set to  0.000000
6/16/2010	8:58:52 PM	H2 MFC set to  0.000000
6/16/2010	8:58:52 PM	BCl3 MFC set to  0.000000
6/16/2010	8:58:52 PM	PHl3 MFC set to  0.000000
6/16/2010	8:58:52 PM	SiCl4 MFC set to  0.000000
6/16/2010	8:58:52 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	8:58:52 PM	Tube furnace set to 0
6/16/2010	8:59:07 PM	Helium valve closed
6/16/2010	8:59:07 PM	H2 valve closed
6/16/2010	8:59:07 PM	BCl3 valve closed
6/16/2010	8:59:07 PM	PH3 valve closed
6/16/2010	8:59:07 PM	SiCl4 pre valve closed
6/16/2010	8:59:07 PM	SiCl4 post valve closed
6/16/2010	8:59:07 PM	Main Vac valve closed
6/16/2010	8:59:07 PM	Bubbler valve closed
6/16/2010	8:59:07 PM	Bypass valve opened
6/16/2010	8:59:07 PM	Helium MFC set to  0.000000
6/16/2010	8:59:07 PM	H2 MFC set to  0.000000
6/16/2010	8:59:07 PM	BCl3 MFC set to  0.000000
6/16/2010	8:59:07 PM	PHl3 MFC set to  0.000000
6/16/2010	8:59:07 PM	SiCl4 MFC set to  0.000000
6/16/2010	8:59:07 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	8:59:07 PM	Tube furnace set to 0
6/16/2010	8:59:41 PM	Helium valve closed
6/16/2010	8:59:41 PM	H2 valve closed
6/16/2010	8:59:41 PM	BCl3 valve closed
6/16/2010	8:59:41 PM	PH3 valve closed
6/16/2010	8:59:41 PM	SiCl4 pre valve closed
6/16/2010	8:59:41 PM	SiCl4 post valve closed
6/16/2010	8:59:41 PM	Bubbler valve closed
6/16/2010	8:59:41 PM	Main Vac valve opened
6/16/2010	8:59:41 PM	Bypass valve opened
6/16/2010	8:59:41 PM	Helium MFC set to  0.000000
6/16/2010	8:59:41 PM	H2 MFC set to  0.000000
6/16/2010	8:59:41 PM	BCl3 MFC set to  0.000000
6/16/2010	8:59:41 PM	PHl3 MFC set to  0.000000
6/16/2010	8:59:41 PM	SiCl4 MFC set to  0.000000
6/16/2010	8:59:41 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	8:59:41 PM	Tube furnace set to 0
6/16/2010	9:04:41 PM	Helium valve closed
6/16/2010	9:04:41 PM	H2 valve closed
6/16/2010	9:04:41 PM	BCl3 valve closed
6/16/2010	9:04:41 PM	PH3 valve closed
6/16/2010	9:04:41 PM	SiCl4 pre valve closed
6/16/2010	9:04:41 PM	SiCl4 post valve closed
6/16/2010	9:04:41 PM	Bubbler valve closed
6/16/2010	9:04:41 PM	Main Vac valve opened
6/16/2010	9:04:41 PM	Bypass valve opened
6/16/2010	9:04:41 PM	Helium MFC set to  0.000000
6/16/2010	9:04:41 PM	H2 MFC set to  0.000000
6/16/2010	9:04:41 PM	BCl3 MFC set to  0.000000
6/16/2010	9:04:41 PM	PHl3 MFC set to  0.000000
6/16/2010	9:04:41 PM	SiCl4 MFC set to  0.000000
6/16/2010	9:04:41 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	9:04:41 PM	Tube furnace set to 0
6/16/2010	9:04:42 PM	Run finished at 9:04 PM
6/16/2010	9:04:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/16/2010	9:23:55 PM	Tube furnace set to 100
6/16/2010	9:24:06 PM	Bypass valve closed
6/16/2010	9:24:06 PM	Main Vac valve closed
6/16/2010	9:24:19 PM	Bypass valve opened
6/16/2010	9:24:19 PM	Main Vac valve opened
6/16/2010	9:27:37 PM	Tube furnace set to 0
6/16/2010	9:27:42 PM	Recipe started at 9:27 PM
6/16/2010	9:27:42 PM	Helium valve closed
6/16/2010	9:27:42 PM	BCl3 valve closed
6/16/2010	9:27:42 PM	PH3 valve closed
6/16/2010	9:27:42 PM	SiCl4 pre valve closed
6/16/2010	9:27:42 PM	SiCl4 post valve closed
6/16/2010	9:27:42 PM	Main Vac valve closed
6/16/2010	9:27:42 PM	Bypass valve closed
6/16/2010	9:27:42 PM	Bubbler valve closed
6/16/2010	9:27:42 PM	H2 valve opened
6/16/2010	9:27:42 PM	Helium MFC set to  0.000000
6/16/2010	9:27:42 PM	H2 MFC set to  500.000000
6/16/2010	9:27:42 PM	BCl3 MFC set to  0.000000
6/16/2010	9:27:42 PM	PHl3 MFC set to  0.000000
6/16/2010	9:27:42 PM	SiCl4 MFC set to  0.000000
6/16/2010	9:27:42 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	9:27:42 PM	Tube furnace set to 0
6/16/2010	9:29:02 PM	Helium valve closed
6/16/2010	9:29:02 PM	BCl3 valve closed
6/16/2010	9:29:02 PM	PH3 valve closed
6/16/2010	9:29:02 PM	SiCl4 pre valve closed
6/16/2010	9:29:02 PM	SiCl4 post valve closed
6/16/2010	9:29:02 PM	Main Vac valve closed
6/16/2010	9:29:02 PM	Bypass valve closed
6/16/2010	9:29:02 PM	H2 valve opened
6/16/2010	9:29:02 PM	Bubbler valve opened
6/16/2010	9:29:02 PM	Helium MFC set to  0.000000
6/16/2010	9:29:02 PM	H2 MFC set to  500.000000
6/16/2010	9:29:02 PM	BCl3 MFC set to  0.000000
6/16/2010	9:29:02 PM	PHl3 MFC set to  0.000000
6/16/2010	9:29:02 PM	SiCl4 MFC set to  0.000000
6/16/2010	9:29:02 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	9:29:03 PM	Tube furnace set to 1000
6/16/2010	9:37:43 PM	Helium valve closed
6/16/2010	9:37:43 PM	PH3 valve closed
6/16/2010	9:37:43 PM	Main Vac valve closed
6/16/2010	9:37:43 PM	Bypass valve closed
6/16/2010	9:37:43 PM	H2 valve opened
6/16/2010	9:37:43 PM	BCl3 valve opened
6/16/2010	9:37:43 PM	SiCl4 pre valve opened
6/16/2010	9:37:43 PM	SiCl4 post valve opened
6/16/2010	9:37:43 PM	Bubbler valve opened
6/16/2010	9:37:43 PM	Helium MFC set to  0.000000
6/16/2010	9:37:43 PM	H2 MFC set to  500.000000
6/16/2010	9:37:43 PM	BCl3 MFC set to  35.000000
6/16/2010	9:37:43 PM	PHl3 MFC set to  0.000000
6/16/2010	9:37:43 PM	SiCl4 MFC set to  50.000000
6/16/2010	9:37:43 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	9:37:43 PM	Tube furnace set to 1000
6/16/2010	9:40:58 PM	Helium valve closed
6/16/2010	9:40:58 PM	PH3 valve closed
6/16/2010	9:40:58 PM	Main Vac valve closed
6/16/2010	9:40:58 PM	Bypass valve closed
6/16/2010	9:40:58 PM	H2 valve opened
6/16/2010	9:40:58 PM	BCl3 valve opened
6/16/2010	9:40:58 PM	SiCl4 pre valve opened
6/16/2010	9:40:58 PM	SiCl4 post valve opened
6/16/2010	9:40:58 PM	Bubbler valve opened
6/16/2010	9:40:58 PM	Helium MFC set to  0.000000
6/16/2010	9:40:58 PM	H2 MFC set to  500.000000
6/16/2010	9:40:58 PM	BCl3 MFC set to  35.000000
6/16/2010	9:40:58 PM	PHl3 MFC set to  0.000000
6/16/2010	9:40:58 PM	SiCl4 MFC set to  50.000000
6/16/2010	9:40:58 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	9:40:58 PM	Tube furnace set to 1000
6/16/2010	9:45:58 PM	H2 valve closed
6/16/2010	9:45:58 PM	BCl3 valve closed
6/16/2010	9:45:58 PM	PH3 valve closed
6/16/2010	9:45:58 PM	SiCl4 pre valve closed
6/16/2010	9:45:58 PM	SiCl4 post valve closed
6/16/2010	9:45:58 PM	Main Vac valve closed
6/16/2010	9:45:58 PM	Bypass valve closed
6/16/2010	9:45:58 PM	Helium valve opened
6/16/2010	9:45:58 PM	Bubbler valve opened
6/16/2010	9:45:58 PM	Helium MFC set to  500.000000
6/16/2010	9:45:58 PM	H2 MFC set to  0.000000
6/16/2010	9:45:58 PM	BCl3 MFC set to  0.000000
6/16/2010	9:45:58 PM	PHl3 MFC set to  0.000000
6/16/2010	9:45:58 PM	SiCl4 MFC set to  0.000000
6/16/2010	9:45:58 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	9:45:58 PM	Tube furnace set to 0
6/16/2010	10:05:58 PM	Helium valve closed
6/16/2010	10:05:58 PM	H2 valve closed
6/16/2010	10:05:58 PM	BCl3 valve closed
6/16/2010	10:05:58 PM	PH3 valve closed
6/16/2010	10:05:58 PM	SiCl4 pre valve closed
6/16/2010	10:05:58 PM	SiCl4 post valve closed
6/16/2010	10:05:58 PM	Main Vac valve closed
6/16/2010	10:05:58 PM	Bypass valve closed
6/16/2010	10:05:58 PM	Bubbler valve closed
6/16/2010	10:05:58 PM	Helium MFC set to  0.000000
6/16/2010	10:05:58 PM	H2 MFC set to  0.000000
6/16/2010	10:05:58 PM	BCl3 MFC set to  0.000000
6/16/2010	10:05:58 PM	PHl3 MFC set to  0.000000
6/16/2010	10:05:58 PM	SiCl4 MFC set to  0.000000
6/16/2010	10:05:58 PM	Bypass solenoid MFC set to  0.000000
6/16/2010	10:05:58 PM	Tube furnace set to 0
6/16/2010	10:05:59 PM	Run finished at 10:05 PM
